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Recently, advanced manufacturing processes including those for flat panel displays, semiconductor devices, and precision moldings, require highly accurate temperature control due to the increased demands of further miniaturization of circuit pattern and of larger thermal operation areas. In these manufacturing processes, uneven temperature distribution will not only deteriorate the electrical quality of the products, but also may lead to mechanical deformation or breakdown including warping or cracks in the product. Thus, the maintaining an uniform temperature is required not only in the steady-state, but also in the transient state. Therefore, to control the multiple heated plate, modeling of the controlled object will be important. For this, a new model named TDM (temperature difference model) that explicitly represents thermal interference with temperature distribution was proposed in our previous paper. This paper proposes a novel control design method for uniform heating based on the TDM. In physical plant, thermal distribution is uniformized in steady state by conducting thermal energy, and this structural characteristics are represented by temperature difference feedback term in TDM. By paying attention to the characteristics, the uniform heating controller is designed as follows. (1)The difference of temperature is fed back by B so as to enhance the thermal interference β. (2)The controlled object enhanced interference is regulated by the controllers to the setpoint value θr. The block diagram of the proposed method is shown in Fig. 1. Fig. 2(a) shows the effectiveness of the proposed controller based on the TDM using an experimental heat plate. For comparison, Fig. 2(b) shows the performance with the traditional controller. These figures demonstrate that the proposed controller provides good uniform performance superior to the traditional controller not only in steady state but also in transient. A new uniform control can have the same scheme as the gradient temperature control, which the authors had developed. Fig. 1. Block diagram of uniform heating

Controller Design for Uniform Heating based on a New Thermal Model with Feedback Structure