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It is well known that the metal-surface properties vary because of the ion sputtering of surface layers in a vacuum. This review contains results of the studies of kinetics change of both oxygen adsorption and oxidation on the surface of transition metals and alloys in a vacuum during the lowenergy ( 10 keV) Ar ions’ bombardment. Particularly, the results of the systematic studies of a surface of the Cu, Ni, Fe, Co single crystals, and Fe–Ni alloy are presented. The important role of such parameters as a dose of the ion bombarding, ion energy and sample temperature in the chemical activity of a surface is noted. As argued, mechanism of interaction in surface–gas system is substantially controlled by the optimal ratio between the energy and the primary ion current density as well as the sputtering rate of natural oxide on the target surface.

Effect of Low-Energy Inert-Gas Ion Bombardment of the Metal Surface on the Oxygen Adsorption and Oxidation