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The systems "thin Ni film - lithium niobate" and "thin Pd film - lithium tantalate" are implanted by Ar + ions with an energy of 100 keV and a dose of 10 16 cm -2 . Analyses of the systems by AFM and SEM have shown that the ion implantation essentially modifies the near-surface structure resulting in a change of its optical, electrical, and mechanical properties. Strong difference in the near-surface structures between implanted systems with Ni or Pd thin films is observed. Such a difference is explained by the heterogeneity of an ion beam and different properties of the materials. The application to the development of high-sensitive pyroelectric detectors with high damage threshold is proposed.

Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate