Synthesewege zu einfachen Di- und Trisilylmethanen: Potentielle Ausgangsstoffe für die CVD-Abscheidung von amorphem Silicium a-SiC: H / Synthetic Pathways to Simple Di- and Trisilylmethanes: Potential Starting Materials for the CVD Deposition of Amorphous Silicon a-SiC :H
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