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Residual stresses were determined in magnetron-sputtered Ag thin films of 400 nm thickness by asymmetric Bragg scattering. The corresponding cos 2 α sin 2 ψ plots were nonlinear which indicates a strong residual gradient along the depth of the samples. The in-plane stress was highly compressive at the sample surface and became tensile at the interface. The out-plane stress was compressive and reached its maximum at the sample interface. The stress gradient changed significantly with postannealing temperature. A Young’s modulus of  E  = 83 GPa and a Poisson ratio of ν = 0 . 3 were measured by surface acoustic wave dispersion.

X-Ray Residual Stress Gradient Analysis in Annealed Silver Thin Films Using Asymmetric Bragg Diffraction