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Amorphous Si 37 C 32 N 31  and Si 37 C 29 N 34  ceramics were produced by pyrolysis of a polyhy-dromethylsilazane precursor. Their structure was investigated by X-ray and neutron diffraction. Wide angle diffraction showed that the Si-atoms are preferentially bonded to nitrogen atoms, but also bonding to carbon atoms was found. This suggests that the excess carbon atoms form an amorphous graphite-like phase. Small angle scattering revealed that the ceramics are inhomogeneous. The evolution of the phase separation during annealing was investigated and it was concluded that amorphous Si 3 N 4  precipitates grow in the Si-C-N materials. The results are compared with previous results for amorphous Si 24 C 43 N 33  produced from a polysilylcarbodiimide precursor [1 - 3].

Study of the Atomic Structure and Phase Separation in Amorphous Si-C-N Ceramics by X-Ray and Neutron Diffraction