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A microwave adapter was fitted to a wax filled reducing wedge in order to transmit 8-12 GHz microwaves through a sub-wavelength rectangular opening. The configuration produced a 70 dB dynamic range and was found suitable for high resolution inspection of 1 to 10,000 ohm per square conducting films. Network analyzer measurements on 12 conducting films that were reported to be 5 to 1500 ohms per square are compared to the reported values and reconciled with electromagnetic theory.

High Resolution Subwavelength Inspection Method for Measuring the Uniformity of Conducting Films