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Simultaneous grain boundary-, surface- and lattice diffusion in hypothetical thin film couples of miscible components was computer simulated. On this basis the diffusion into fixed and moving grain boundaries is discussed with respect to the determination of diffusivities by depth profiling methods. The data evaluated from the synthesised depth profiles according to Whipple-Le Claire as well as to Gilmer and Farrell were compared with the diffusivities used for the computation. Agreement was found for systems with a fixed grain boundary network. Moving grain boundaries, however, may cause errors of an order of magnitude towards lower grain boundary diffusivities

The Influence of Grain Boundary Migration on the Diffusion Behaviour of Thin Films