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Analysis of Binary Compound Thin Films with the Electron Microprobe Two methods for the quantitative analysis of binary compound thin films by electron micro-probe have been developed and applied on some compounds with A 15-structure. Appropriate calibration curves for these compounds are given and compared with results of three theoretical or semiempirical methods showing fairly good agreement.

Analyse dünner Schichten binärer Verbindungen mit der Elektronenstrahlmikrosonde / Analysis of Binary Compound Thin Films with the Electron Microprobe