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The behaviour of energetic heavy ions in thin films is simulated by means of a Monte Carlo method taking especially into account the energy loss of the scattered particles. Based on a variably matched screened Coulomb potential the calculations yield the angular and energy distributions of the transmitted ions. The results show a good agreement with the theory of Meyer. Furthermore for keV He ions scattering distributions have been measured in C, Al and Ag, which agree fairly well with the computations, if a suitable fit of the screening parameter is used in the Monte Carlo simulations.

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Monte-Carlo-Rechnungen und Messungen zur Vielfachstreuung von schweren Ionen in dünnen Folien / Monte Carlo Calculations and Measurements Concerning the Multiple Scattering of Heavy Ions in Thin Films