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A short literature survey on the subject is given with special emphasis on discrepancies and contradictional interpretations of results. Our own experiments on thin copper films evaporated onto glass substrates at different condensation temperatures are reported. Density values were calculated from the film thickness, which was measured by Kiessig's method and from the deposited mass determined by atomic absorption spectrometry as well as gravimetric measurements. The density defect decreases with increasing film thickness, as already established, and also with temperature.

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Über die Temperaturabhängigkeit der Dichte von dünnen Kupferaufdampfschichten / On the Temperature Dependence of the Density of thin Vacuum Deposited Copper Films