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Optical measurement systems are an important part of the portfolio of 3D topography sensors. By precise, contactless and rapid measurements these sensors constitute an alternative to tactile instruments. In this contribution the principle of a laser interferometric distance sensor is presented, which in combination with lateral scan axes acts as a topography sensor and also as distance sensor for the compensation of vibrations in a coherence scanning Linnik interferometer. An advantage of this distance sensor is its high acquisition rate of height values, which in case of working as a topography sensor enables high scan velocities as it is demonstrated at a chirp standard measured with a scan velocity of 80 mm/s. This is much higher than the scan velocity of tactile instruments, which are typically limited up to 1 mm/s. In addition, the compensation of vibration disturbances demonstrates the capability of the fast distance measurement.

High-speed laser interferometric distance sensor with reference mirror oscillating at ultrasonic frequencies