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We present a scanning confocal laser-Doppler vibrometer microscope for sensitive, contactless measurement of microelectromechanical systems (MEMS). This systems enables the dynamic analysis up to 3.2 MHz with a lateral resolution of few micrometers. We show measurements on developed MEMS for vocal-energy harvesting in wearables and medical implants. For efficient harvesting a cantilever beam with a serpentine form was designed with a fundamental resonance at 200 Hz. We verified the simulated mode shapes with our vibration measurements. The observed deviations in resonance frequencies between simulation and measurement are due to modelling and manufacturing dissimilarities.

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Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables: Scannendes konfokales Vibrometermikroskop für die Schwingungsanalyse von Energy-Harvesting-Microsystemen für Wearables