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We report the fabrication and characterization of a plasmonic metasurface comprising electrically-contacted sub-wavelength gold dipole nanoantennas, conformally coated by a thin hafnia film, an indium tin oxide layer and a backside mirror, forming metal–oxide–semiconductor (MOS) capacitors, for use as an electrically-tunable reflectarray or metasurface. By voltage biasing the nanoantennas through metallic connectors and leveraging the carrier refraction effect in the MOS capacitors, our measurements demonstrate phase control in reflection over a range of about 30°, with a constant magnitude of reflection coefficient of 0.5, and the absence of secondary lobes. Comprehensive electromagnetic and quantum carrier models of the structure are developed and are in excellent agreement with the measurements. The metasurface holds promise for use as an optical phased array.

Electrically tunable plasmonic metasurface as a matrix of nanoantennas