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We propose, design, fabricate and characterize a subwavelength grating slot (SWGS) waveguide on silicon platform at short-wave infrared (SWIR) wavelength of 2 μm. The mode guiding mechanism, i.e. SWGS mode, is a combination of surface-enhanced supermode and Bloch mode. We also design and fabricate a low-loss strip-to-SWGS mode converter. We further demonstrate chip-scale direct modulation data transmission at 2 μm through the fabricated SWGS waveguides. Favorable operation performance is achieved in the experiment.

Subwavelength grating slot (SWGS) waveguide at 2 μm for chip-scale data transmission