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An atmospheric pressure plasma jet (APPJ) operated with a CF 4 /O 2 /He gas mixture has recently been demonstrated to decontaminate actinide materials such as plutonium and uranium. However, a comprehensive study of the chemical kinetics for an atmospheric plasma containing CF 4 /O 2 /He does not exist. To understand and optimize the decontamination process, ultraviolet (UV) absorption spectroscopy was employed to measure chemically active species, such as dioxygen fluoride (O 2 F) and ozone (O 3 ), inside and outside the APPJ. At room temperature operation, O 2 F was found to be a significant long-lived radical, which lasted up to 10 ms in the effluent with a density of about 10 15  cm -3 . The concentration of O 3  does not fall off and keeps its density constant up to 10 ms, which indicates the absence of atomic fluorine (F) outside the APPJ. Measurements were in good agreement with a gas-phase post-plasma simulation. In summary, atomic fluorine produced inside the APPJ recombines with O 2  molecules, producing O 2 F molecules, which can live long enough to etch metal surfaces.

CF 4 /O 2 /He Reaction Chemistry in an Atmospheric Pressure Plasma Jet