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In this paper, a power supply which can generate pulsed high voltage with high repetition rate is proposed. It can generate pulsed high voltage up to several kilovolts even from several volts dc. This circuit is the Marx-generator which consists of multi-staged magnetic energy recovering switches. A magnetic energy recovering switch is made of four IGBTs and one capacitor. Two IGBTs in reverse-series are connected in anti-parallel. Their terminals are connected to the capacitor. It generates high voltage by absorbing the magnetic energy of an inductor to the capacitor. In order to generate high voltage, this Marx-generator utilizes the inductor. While all the switches are turned on, current flows through the switches and the inductor. When the switches are turned off, the magnetic energy which stored in the inductor is charged in the capacitors in parallel. Next, by turning on the switches, the capacitors discharge in series and high voltage is applied to the inductor. Experiments were carried out. A pulsed voltage of 1.5 kV with a repetition rate of 5 kHz was generated from 36 V dc. It was confirmed that this circuit can be applied to a power supply for high repetition plasma discharge.

Magnetic Energy Recovery Type Marx-Generator for High Repetition Plasma Discharge