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Nonthermal plasma technologies offer an innovative approach to the problem of decomposing various volatile organic compounds (VOCs). We focused on an AC-energized ferroelectric packed-bed plasma reactor to study the decomposition/destruction efficiency and byproduct analysis for toluene, o-xylene, trichloroethylene, and their mixture from 50 to 230 ppm in dry air. The effects of gas flow rate, concentration, moisture content, and reactor operating conditions on the decomposition and analysis of reactant conversion for each VOC were investigated for suitable applications of the emerging technology. Laboratory-scale packed-bed plasma technology was successfully demonstrated for the application of VOC control in semiconductor clean room environments.

Decomposition of Toluene, o-Xylene, Trichloroethylene, and Their Mixture Using a BaTiO 3 Packed-Bed Plasma Reactor