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Dielectrophoretic and electrohydrodynamic traps are presented that can localize microparticles on specified positions of an interdigitated electrode array. For the generation of the traps, an interdigitated electrode array chip covered by an oxide layer with 10 μηι χ 10 μιη opening windows is designed and fabricated, then an AC signal with varying frequency is applied to the array, the traps are finally created on the positions between two opening windows or inside the windows by dielectrophoretic and electrohydrodynamic effects. In addition, the dielectrophoretic and electrohydrodynamic forces are analyzed numerically using a finite element method.

Numerical and Experimental Study on Dielectrophoretic and Electrohydrodynamic Traps using Micro-Particles on an Interdigitated Electrode Array System