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Silicone polymeric films were deposited on silicon substrate, and their adhesive and nanomechanical properties were studied. The surface characterization and tribological (wear) behaviour were investigated using atomic force microscopy. The surface Gibbs energy was estimated locally, using a special test rig where the contact angle of very small (with a diameter of about 100 μm) sessile drops was measured by processing of the image from a camera. The nanomechanical properties of the films were tested by using Hysitron’s test instruments. Such films seem to be interesting for application on contact surfaces of microgrippers used in assembly processes in micro electro mechanical systems and nanotechnologies.

Adhesive and nanomechanical properties of polymeric films deposited on silicon