Formation of Nanocrystals inBCN Thin Films Deposited by Radio-Frequency PACVD: Dedicated to Professor Dr.-Ing. Wolfgang Laqua on the occasion of his 60th birthday | Zendy

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Formation of Nanocrystals inBCN Thin Films Deposited by Radio-Frequency PACVD: Dedicated to Professor Dr.-Ing. Wolfgang Laqua on the occasion of his 60th birthday

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