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Biomedical microsystems attain to contact with environments like blood, ephitHelium and saline solutions therefore they need an encapsulation. Parylene seems to be a suitable polymer to cover the implants and protect them against moisture and aggressive environment. This paper describes the characterisation of Parylene C coatings and its possibilities to protect implants. Beside the encapsulation of biomedical microsystems the manufacturing of fexible electrodes and the cytotoxicity behavior of RIE etched Parylene layers was investigated.

UNTERSUCHUNGEN ZUR ABSCHEIDUNG VON PARYLEN C ALS KAPSELUNCSMATERIAL FÜR BIOMEDIZINISCHE MIKROIMPLANTATE