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Optical analysis of integrated circuits (IC) is a powerful tool for analyzing security functions that are implemented in an IC. We present a photon emission microscope for picosecond imaging of hot carrier luminescence in ICs in the near-infrared spectral range from 900 to 1700 nm. It allows for a semi-invasive signal tracking in fully operational ICs on the gate or transistor level with a timing precision of approximately 6 ps. The capabilities of the microscope are demonstrated by imaging the operation of two ICs made by 180 and 60 nm process technology.

Picosecond imaging of signal propagation in integrated circuits