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Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator, known as holographic femtosecond laser processing, provides the advantages of high throughput and high-energy use efficiency. Therefore, it has been widely used in many applications, including laser material processing, two-photon polymerization, two-photon microscopy, and optical manipulation of biological cells. In this paper, we review the development of holographic femtosecond laser processing over the past few years from the perspective of wavefront and polarization modulation. In particular, line-shaped and vector-wave femtosecond laser processing are addressed. These beam-shaping techniques are useful for performing large-area machining in laser cutting, peeling, and grooving of materials and for high-speed fabrication of the complex nanostructures that are applied to material-surface texturing to control tribological properties, wettability, reflectance, and retardance. Furthermore, issues related to the nonuniformity of diffraction light intensity in optical reconstruction and wavelength dispersion from a computer-generated hologram are addressed. As a result, large-scale holographic femtosecond laser processing over 1000 diffraction spots was successfully demonstrated on a glass sample.

Holographic femtosecond laser manipulation for advanced material processing