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In order to improve safety, lifetime and energy efficiency of turbo machines, the behavior of the turbine blades has to be monitored during operation. This is a great challenge for metrology, since small, robust and non-contact position measurement techniques are required that offer both micrometer accuracy and microsecond temporal resolution. The Laser-Doppler-Distance (LDD) -Sensor proved to be an adequate technique to perform such measurements. However, the usage in turbo machines requires a miniaturized and temperature-stable sensor-head. In this paper we introduce a miniaturized design of the LDD-sensor that is based on common-path detection. First results indicated that the numerical aperture of the common-path detection is small in comparison to former implementations that used separate paths for illumination and detection. We find that decreasing the numerical aperture strongly increases the systematic measurement uncertainty. For this purpose a novel diffractive optical element containing a diffracting-lens was designed and used to increase the numerical aperture of the common-path detection without affecting the sensor size. Experiments prove that the new element reduces the relative systematic measurement uncertainty by a factor of ten. The mean systematic position measurement uncertainty amounts to Δ z  mean ≈16 μm. The resulting sensor has dimensions of 25×25×60 mm 3 , offers temperature-stability and achieves micrometer resolution.

Miniaturization of an interferometric distance sensor employing diffractive optics