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Effect of plasma sterilization for bacillus subtilis var. natto was studied using pulsed laser ablation and low pressure RF plasma, which usually used for functional thin film deposition. In addition, bulk and powder were used as the targets and compared the effect for the sterilization . Experimental results suggest that bacillus subtilis var. natto was not sterilized in the only vacuum state. However, they can be sterilized using low pressure RF plasma and pulsed laser ablation plasma irradiation. The effect of the sterilization using powder target was higher than that of bulk target, and that of the pulsed laser ablation plasma was higher than RF plasma. Those results suggest that the effect of sterilization was decided by the density of the high-energy metal atoms and ions.

Sterilization for Bacillus Subtilis var. natto by Low Pressure Sputtering and Laser Ablation Plasma using Metal Powder Target