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Shoto Furuichi1), Takashi Tsuchiya2), Koji Horiba3), Masaki Kobayashi3), Makoto Minohara3), Hiroshi Kumigashira3) and Tohru Higuchi1) 1) Department of Applied Physics, Tokyo University of Science, Katsushika, Tokyo 125-8585, Japan 2) International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan 3) Photon Factory, KEK, Tsukuba, Ibaraki 305-0801, Japan Fax: 81-3-5876-1401, e-mail: 1516628@ed.tus.ac.jp

Structural and Electrical Properties of BaPrO<sub>3-<i>δ</i></sub> Thin Film with Oxygen Vacancies