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In this study, multi-walled carbon nanotubes and few-layer graphene sheets have successfully grown on Si and polyimide substrates at relatively low temperature of 230~260°C by the microwave-excited surface wave plasma technique. Graphite-encapsulated Ni nanoparticles have been used as the catalyst for growing CNMs in NH3/CH4 plasma. It has been found that bias voltage and nature of the substrate can greatly influence the CNMs structure.

Low Temperature Growth of Carbon Nanomaterials on the Polymer Substrates by Microwave Plasma Technique