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We have prepared water-repellent thin films on polycarbonate substrates by inductively coupled C2H2F2/Ar plasma CVD method for hydrophobic nature of automobile plastic window. The adhesion of water-repellent film is investigated by an ion-assist effect. Main plasma was produced by inductive discharge. C2H2F2 and Ar mixture gases were introduced into the vacuum chamber at a fixed each other pressure of 20Pa. As the source gas includes fluorine atoms, negative ions are formed in the deposition area. Thus, in order to achieve the ion assist effect to the deposition due to the negative ions, the substrates was biased by positively pulsed voltage. The adhesion of a deposition film was estimated by the hardness of the pencil. It is obtained that the hardness pencil of the prepared film at substrate bias frequency of 500 Hz and pulsed bias voltage of 300V is the highest in various conditions. A water contact angle of the prepared film is attained at about 100 degree.

transactions of the materials research society of japan

Preparation of Water-Repellent Thin Film with Inductive Plasma using C&lt;sub&gt;2&lt;/sub&gt;H&lt;sub&gt;2&lt;/sub&gt;F&lt;sub&gt;2&lt;/sub&gt;/Ar gases and Investigation of Its Adhesion by Positively Pulse-Biasing