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Retsuo Kawakami, Takeshi Inaoka, Kikuo Tominaga, Masahito Niibe, Takashi Mukai, Atsushi Takeichi and Toshiaki Fukudome Institute of Socio-Techno Science Technology, The University of Tokushima, Tokushima 770-8506, Japan Fax: 81-88-656-7441, e-mail: retsuo @ee.tokushima-u.ac.jp University of Hyogo, 3-1-2 Kouto, Kamigoori, Ako-gun, Hyogo 678-1205, Japan Fax: 81-791-58-0242, e-mail: niibe @lasti.u-hyogo.ac.jp Nichia Corporation, Anan, Tokushima 774-0044, Japan Fax: 81-884-21-0148, e-mail: takashi.mukai @nichia.co.jp

Synergy Effect of Xenon Plasma Ions and Ultraviolet Lights on GaN Etch Surface Damage and Modification