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This research was designed for planning a progress of photocatalytic properties of TiO2 thin films prepared by RF magnetron sputtering method with depositing Pt particles on top. The films prepared without heating substrate showed anatase structure. The organic-decomposition properties of TiO2 thin films with Pt deposition showed large decomposition rate compared with these without Pt deposition. But optically excited hydrophilicity characteristics were descreased in the case of Pt deposition Keyword: TiO2 thin films, RF magnetron sputtering, photocatalyst, Pt-deposition

Preparation of Pt-deposited TiO<sub>2</sub> films and evaluation of photocatalytic properties