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1 Institute of High Technology Physics, Tomsk Polytechnic University, 30 Lenin Ave., Tomsk, 634050, Russia Belarusian State University, 4 Nezavisimosti ave., 220030, Minsk, Republic of Belarus High-Current Electronics Institute of Russian Academy of Sciences, 2/3 Academicheskiy ave., Tomsk, 634055, Russia Siberian Physic-Technique Institute at Tomsk State University, 1 Novosobornaya Square, Tomsk, 634050, Russia Scientific Research Institute of Semiconductor Elements, 99a Krasnoarmeyskaya st., Tomsk, 634034, Russia Tel./Fax: 8 (3822) 41-91-58, e-mail: remnev@hvd.tpu.ru

Formation of Nano Diamonds in Surface Layer of Materials during Short Pulse Ion Beam Implantation