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We report on the monolayer formation of hydrocarbons with terminal groups of thiol, hydroxyl and alkynyl groups on H-terminated silicon using UV light in order to clarify the ability to form the well-defined monolayer. The each molecule was dissolved in the solution (100 mM) and irradiated with UV light on the Si-H substrate. The monolayer formation was investigated by water contact angle, XPS, AFM and ellipsometry. The molecules formed hydrophobic monolayer, but the densities of the monolayers were loose. The hydrocarbons with thiol and vinyl formed the most densely packed monolayer based on the photochemical reactivity with Si-H.

Monolayer formation of hydrocarbons with various reactive groups via photochemical reaction on Si(111)-H surface