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Khairurrijal, Fatimah A. Noor, Mikrajuddin Abdullah, Sukirno, and Seiichi Miyazaki Physics of Electronic Materials Research Division, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia Fax: 62-22-250-6452, e-mail: krijal@fi.itb.ac.id *Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima 739-8530, Japan Fax: +81-82-422-7038, e-mail: semiya@hiroshima-u.ac.jp

transactions of the materials research society of japan

Theoretical Study on Leakage Current in MOS with High-K Dielectric Stack: Effects of In-plane-Longitudinal Kinetic Energy Coupling and Anisotropic Masses