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Yutaka Sawada, Takeshi Kondo, Takeshi Aoyamaand Riko Ozao Department of Industrial Chemistry, Graduate School of Engineering, Tokyo Polytechnic University, 1583 Iiyama, Atsugi, Kanagawa 2433-0297, Japan Fax: 81-046-942-9532, e-mail: sawada@nano.t-kougei.ac.jp Department of Informatics and Media Technology, SONY Institute of Higher Education, 428 Nurumizu, Atsugi, Kanagawa 243-8501, Japan, e-mail: ozao@shohoku.ac.jp

Comparison of Indium-Tin-Oxide Transparent Conducting Films Fabricated By Spray CVD Using Different Tin Chlorides