Open AccessA Study of the properties of TiO2/SiO2/ZrO2 Thin Films Deposited by RF Magnetron Sputtering
Author(s) -
Dae Kwang Jang,
Young Mi Kim,
Yee Rin Jung,
Ju Hak Lee,
Byung Ho Ha,
KiHong Kim
Publication year - 2019
Publication title -
journal of korean ophthalmic optics society
Language(s) - English
Resource type - Journals
ISSN - 1226-5012
DOI - 10.14479/jkoos.2019.24.3.287
Subject(s) - materials science , sputter deposition , high power impulse magnetron sputtering , sputtering , thin film , cavity magnetron , optoelectronics , engineering physics , nanotechnology , engineering
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