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This article describes and analyses an interferometric method for measuring displacements and deformation. The method can be used for a very accurate evaluation of the change in the surface shape of structures used in industry. The paper proposes several multistep phase calculation algorithms and describes an automatic evaluation process using the measurement technique. A complex analysis is also performed of various factors that can have a negative effect on the practical measurement and evaluation process. An analysis is made of the proposed multistep phase calculation algorithms using the proposed error model. It is shown that the resulting phase measurement errors can be effectively reduced by using suitable phase calculation algorithms. The analysis can be applied for a complex comparison of the accuracy and stability of such algorithms.

Analysis of Phase Evaluation Algorithms in an Interferometric Method for Static Deformation Measurement