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The dynamic characteristics of a proposed two degree-of-freedom (DoF) actuator under amplitude feedback control are investigated in this paper. The feature of our proposed two DoF resonant actuator is that movement in the xand zaxes can be independently controlled by vector control. Two controllers: a PID controller and a proxy-based sliding mode (PSM) controller were compared for amplitude feedback control. A simulation model using finite element method (FEM) and MATLAB/Simlink is made, and the dynamic characteristics of the actuator under feedback control are calculated. Moreover, measurements on a prototype are conducted to show the validity of the simulation results.

Dynamic Characteristic Analysis and Experimental Verification of 2-DoF Resonant Actuator under Feedback Control