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T. Ogiwara,* K. Yanagiuchi, and H. Yoshikawa a Materials Analysis Station, Reseach Network and Facility Services Division, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan b Technical Center, TDK Corporation, 2-15-7 Higashi-Ohwada, Ichikawa, Chiba 272-8558, Japan c Surface Chemical Analysis Group, Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan *OGIWARA.Toshiya@nims.go.jp

極低角度入射イオンビームを用いたオージェ深さ方向分析によるFeNi/CoFeB/FeNi多層薄膜の分析