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Surface analysis is a measurement science. Therefore, the standardization process is to find the best way to get the best quantitative analytical results. That means we have to erase every possibility to make errors or fluctuations based on the scientific inspection, and find the one best way to give the smallest error or fluctuation. This paper follows the track of the concept from the compatibility to standards, and introduces the relation between the standardization activities by VAMAS / ISO and the Surface Analysis Society of Japan.

Follow the Track of the Standardization