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T.Yamamoto,, Y. Hanaoka, N. Mayama, T. Kaito, T. Adachi, M. Nojima 3 and M. Owari 1,4 1 Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan 2 SII Nanotechnology Inc., 36-1 Takenoshita, Oyama-cho, Sunto-gun, Shizuoka 410-1393, Japan 3 Research Institute of Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan 4 Environmental Science Center, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan y1ndggi7@iis.u-tokyo.ac.jp

Specimen preparation for three-dimensional atom probe using the focused ion-beam lift-out technique