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ISO / TC201 (Surface Chemical Analysis) / SC4 is the subcommittee to work for standardization in depth profiling. The standard drafts of ISO 14606, TR 15969, and TR 22335 have been published in order to achieve a good depth resolution, to estimate a sputtered depth, and to convert a sputtering time to the sputtered depth by a sputtering rate. ISO/TC201/SC4 is also working to prepare new work items on “ion beam alignment” and “utilization of standard multiple layers”.

Current Activities of SC4 Depth Profiling in ISO/TC201 Surface Chemical Analysis