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An overview of the current attention to the oxide epitaxy is given to emphasize the importance of atomic scale control of oxide substrate surfaces. Examples of the ways to define the surfaces are presented. A detailed study on SrTiO3 substrate surfaces, including surface dynamics during wet etching and high temperature annealing is presented in real space in order to show the state of the arts for regulation of oxide substrate surface towards perfect epitaxy of oxide heterostructures.

hyōmen kagaku/hyoumen kagaku

Comparative Study on Surfaces of Single-Crystalline Substrates. From Dielectric Substance to Semiconductor and Metal. Atomic Scale Surface Control of Metal Oxide Substrates towards Perfect Epitaxy.