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Makoto SAKURAI, Carsten THIRSTRUP and Masakazu AONO *The Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198 **Core Research for Evolutional Science and Technology (CREST) Program , Japan Science and Technology Corporation (JST) 5-3 Yonban-cho, Chiyoda-ku, Tokyo 102-0081 ***Department of Precision Science and Technology, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871 (Received August 25, 1998)

Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Formation of Silicon Dangling Bonds Using STM Lithography and Its Decoration.