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Extremely asymmetric x-ray diffraction is a powerful technique for observing minute strains near crystal surfaces. This work focused on the peak intensity of the rocking curve and studied the change in peak intensity with respect to the wavelength of x-rays using dynamical diffraction calculations. From the calculations assuming uniaxial strain along the depth direction of the crystal, it was found that the peak intensity becomes more sensitive to strain as the wavelength decreases below a critical value (critical wavelength λc) at which the total reflection of incident x-rays is enhanced. Comparing the profile of peak intensity vs. wavelength for a strained crystal with that for an unstrained crystal, it is clear that the introduction of compressive or tensile strain causes either enhancement or reduction of the intensity. The difference spectra generated by subtraction of the profile of peak intensity vs. wavelength for an unstrained crystal from that for a strained crystal shows a systematic change with respect to the strain parameters, the maximum strain value ε0 and the thickness of the strained layer H. It is expected that we can evaluate the strain more quickly and easily by fitting the difference spectra than by using the rocking curves when the rocking curves are featureless. [DOI: 10.1380/ejssnt.2013.127]

Behavior of Peak Intensity of Rocking Curve for Asymmetric Bragg Reflection Uniquely Determined by Strain Distribution