Electrical Properties of RF-Sputtered FeSix Films and Their Relationship to Phase Transition from ε-FeSi to β-FeSi2 during Post-Annealing | Zendy

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Electrical Properties of RF-Sputtered FeSi<sub>x</sub> Films and Their Relationship to Phase Transition from ε-FeSi to β-FeSi<sub>2</sub> during Post-Annealing

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