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An X-ray holographic method that reconstructs a single layer of atoms at the interface between ultra-thin film and substrate crystal is studied. We applied the method to the analysis of the interface structure of iron-silicide grown on the Si(111) surface, the structure of which is considered to be the CsCl-type FeSi. First we confirmed by simulations that the method is useful to discriminate whether an additional layer at the interface exists or not, using calculated X-ray intensities. Next we applied the method to the analysis of experimental data obtained for Si(111)-2×2-Fe. The result indicated the existence of the interface atoms, corresponding to the B8 model for CsCl-type FeSi. [DOI: 10.1380/ejssnt.2009.525]

Study of the Interface Structure of Epitaxial Ultra-Thin Film by an X-Ray Holographic Imaging Method