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The study of two- dimensional (2D) materials is a rapidly growing area withinnanomaterial research. However, the high equipment costs, which include theprocessing systems necessary for creating these materials, can be a barrier toentry for some researchers interested in studying these novel materials. Suchprocess systems include those used for chemical vapor deposition. This articlepresents the first open-source design for an automated chemical vapordeposition system that can be built for less than a third of the cost for asimilar commercial system. Our design can be easily customized and expanded on,depending upon the needs of the user. With a process chamber built asdescribed, we demonstrate that a variety of 2D nanomaterials and theirheterostructures can be grown via chemical vapor deposition. Specifically, ourexperimental results demonstrate the capability of this open-source design inproducing high quality, 2D nanomaterials such as graphene and tungstendisulfide, which are at the forefront of research in emerging semiconductordevices, sensors, and energy storage applications.

Open-source automated chemical vapor deposition system for the production of two - dimensional nanomaterials