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Highly confining waveguides without degraded nonlinear coefficient and lowpropagation losses have been fabricated in lithium niobate by a new processthat we called High Vacuum Vapor-phase Proton Exchange (HiVac-VPE). Indexcontrast, index profile, nonlinearity and crystallographic phases are carefullyinvestigated. Original analysis of index profiles indicates that the waveguidescontains sub-layers whose depths are depending on the exchange durations.Propagation behavior, propagation losses and Second Harmonic Generation (SHG)response of HiVac-VPE channel waveguides are investigated at telecomwavelength. The results recommend HiVac-VPE as very promising technique forfabricating efficient nonlinear photonic integrated circuits in LN crystals.

Lithium niobate waveguides with high-index contrast and preserved nonlinearity fabricated by High Vacuum Vapor-phase Proton Exchange