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Development of low-loss photonic components in the ultraviolet (UV) band willopen new prospects for classical and quantum optics. Compared with otherintegrated platforms, aluminum nitride (AlN) is particularly attractive as itfeatures an enormous bandgap of ~6.2 eV and intrinsic chi(2) and chi(3)susceptibilities. In this work, we demonstrate a record quality factor of 2.1 x105 (optical loss ~ 8 dB/cm) at 390 nm based on single-crystalline AlNmicrorings. The low-loss AlN UV waveguide represents a significant milestonetoward UV photonic integrated circuits as it features full compatibility forfuture incorporation of AlGaN-based UV emitters and receivers. On-chip UVspectroscopy, nonlinear optics and quantum information processing can also beenvisioned.

Ultra-high-Q UV microring resonators based on single-crystalline AlN platform